Opto-Electronic Engineering, Volume. 31, Issue 10, 21(2004)

Study on fabrication of gray-scale mask for diffractive optical elements

[in Chinese]1... [in Chinese]2, [in Chinese]1, [in Chinese]1, [in Chinese]1 and [in Chinese]1 |Show fewer author(s)
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    References(5)

    [3] [3] DASCHNER W,LONG P,STEIN R,et al.Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass [J].Applied Optics,1997,36(20):4675-4680.

    [4] [4] SULESKI T J,O'SHEA D C.Gray-scale masks for diffractive-optics fabrication:I.Commercial slide imagers[J].Applied Optics,1995,34(32):7507-7526.

    [5] [5] SHRAUGER V E,ERWIN L L,AHN J L,et al.Computer-generated multiple-phase-level holograms by use of color-printer techniques [J].Applied Optics,1994,33(23):5318-5327.

    [6] [6] WANG M R,SU H.Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication [J].Applied Optics,1998,37(32):7568-7576.

    [7] [7] BLAIR P,TAGHIZAEDH M R,PARKES W,et al.High-efficiency binary fan-out grating by modulation of a high-frequency carrier grating [J].Applied Optics,1995,34(14):2406-2412.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on fabrication of gray-scale mask for diffractive optical elements[J]. Opto-Electronic Engineering, 2004, 31(10): 21

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    Paper Information

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    Received: Mar. 11, 2004

    Accepted: --

    Published Online: Nov. 14, 2007

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