Opto-Electronic Engineering, Volume. 31, Issue 10, 21(2004)

Study on fabrication of gray-scale mask for diffractive optical elements

[in Chinese]1, [in Chinese]2, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]1
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on fabrication of gray-scale mask for diffractive optical elements[J]. Opto-Electronic Engineering, 2004, 31(10): 21

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    Received: Mar. 11, 2004

    Accepted: --

    Published Online: Nov. 14, 2007

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