Infrared and Laser Engineering, Volume. 51, Issue 5, 20220270(2022)

Advances in III-nitride-based microresonator optical frequency combs (Invited)

Changzheng Sun... Yanzhen Zheng, Bing Xiong, Lai Wang, Zhibiao Hao, Jian Wang, Yanjun Han, Hongtao Li and Yi Luo |Show fewer author(s)
Author Affiliations
  • Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
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    Figures & Tables(8)
    GaNOI nonlinear photonics platform
    (a) NIR optical frequency comb generation in sputtered AlN microring resonators[18]; (b) Near visible and green frequency comb generation via SHG, SFG and THG[19]
    (a) Device schematic, (b) dispersion profile, and SEM images of (c) microring waveguide and (d) bus waveguide facet of a crystalline AlN microring resonator[14] ; (e),(f) Broadband NIR and near visible band optical frequency comb generation[21]
    (a) Schematic of Pockels soliton microcomb generation via OPO; (b)-(c) Comb initiation and expansion, and (d) the experimental setup[28]
    (a) FWM spectrum from a 3-mm-long GaN waveguide with 250 mW pump power; (b) FWM conversion efficiency vs. pump power[31]
    (a)-(d) Fabrication procedures of GaN microring resonators; (e)-(f) SEM images of the ring waveguide and the bus waveguide in a GaN microring resonator[17]
    (a) Chaotic frequency comb under TM00 pump; (b) Soliton microcomb under TM00 pump; (c) Raman assisted chaotic Kerr comb with TE00 pump[17]
    • Table 1. Properties of microcomb material platforms at telecom wavelengths

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      Table 1. Properties of microcomb material platforms at telecom wavelengths

      Materialnχ(2) /pm·V−1n2/10−18m2·W−1λTPA/nm Mode area/μm2FSR/GHzQint/×106Pth/mW Remarks
      Al0.2Ga0.8As[11]3.31802614830.2810001.5~ 0.03Bonding
      Si3N4[12]20.25460~199~10< 1
      AlN[13-14]2.160.234402.34350.825MOCVD growth
      Diamond[15]2.40.824500.819250.9720
      LiNbO3[16]2.2540.186351200~44.2Bonding
      GaN[17]2.3−91.47291.63241.86.2MOCVD growth
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    Changzheng Sun, Yanzhen Zheng, Bing Xiong, Lai Wang, Zhibiao Hao, Jian Wang, Yanjun Han, Hongtao Li, Yi Luo. Advances in III-nitride-based microresonator optical frequency combs (Invited)[J]. Infrared and Laser Engineering, 2022, 51(5): 20220270

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    Paper Information

    Category: Special issue—Microcavity optical frequency comb technology

    Received: Mar. 10, 2022

    Accepted: May. 16, 2022

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.3788/IRLA20220270

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