Acta Optica Sinica, Volume. 43, Issue 11, 1127001(2023)

Proton Displacement Damage in 975 nm Quantum Well Laser Diodes

Cuicui Liu1, Hongqi Jing2, Nan Lin2,3, Gang Guo1、*, and Xiaoyu Ma2,3、**
Author Affiliations
  • 1National Innovation Center of Radiation Application, China Institute of Atomic Energy, Beijing 102413, China
  • 2National Engineering Center for Optoelectronic Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 3College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(9)
    Band gap structure and refractive index distribution of LD. (a) Whole device; (b) QW local
    Effect of 10 MeV proton on LD. (a) Source of vacancy defects in LD; (b) types of vacancy defects in epitaxial layers;(c) distribution of vacancy defects in epitaxial layers
    Laser spectra of LDs before and after 10 MeV proton injected. (a) 3×108 cm-2; (b) 3×109 cm-2; (c) 3×1010 cm-2; (d) 1×1011 cm-2; (e) 3×1011 cm-2
    Pout-I characteristics of LDs before and after 10 MeV proton injected. (a) 3×108 cm-2; (b) 3×109 cm-2; (c) 3×1010 cm-2;(d) 1×1011 cm-2; (e) 3×1011 cm-2
    V-I characteristics of LDs before and after 10 MeV proton injected. (a) 3×108 cm-2; (b) 3×109 cm-2; (c) 3×1010 cm-2;(d) 1×1011 cm-2; (e) 3×1011 cm-2
    Band gap structure at QW of LD. (a) Unirradiated; (b) irradiated
    Relation between change of external differential quantum efficiency and proton fluence
    • Table 1. Structural parameters of QW LD

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      Table 1. Structural parameters of QW LD

      Epitaxial layerMaterialThickness /nm
      Cap layerP+-GaAs150
      P-cladding layerP-Al0.355GaAs1000
      BarrierAl0.154GaAs to Al0.240GaAs40
      Single QWIn0.160GaAs7.9
      BarrierAl0.240GaAs to Al0.154GaAs40
      Waveguide layerAl0.240GaAs480
      N-gradient layerN-Al0.295GaAs480
      N-cladding layerN-Al0.291GaAs950
      N-transition layerN-GaAs to N-Al0.285GaAs160
      SubstrateGaAs buffer500
    • Table 2. Proton irradiation experimental parameters

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      Table 2. Proton irradiation experimental parameters

      SampleEnergy /MeVFluence /(cm-3DDD /(MeVg-1
      LD 1103×1082.37×106
      LD 2103×1092.37×107
      LD 3103×10102.37×108
      LD 4101×10117.91×108
      LD 5103×10112.37×109
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    Cuicui Liu, Hongqi Jing, Nan Lin, Gang Guo, Xiaoyu Ma. Proton Displacement Damage in 975 nm Quantum Well Laser Diodes[J]. Acta Optica Sinica, 2023, 43(11): 1127001

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    Paper Information

    Category: Quantum Optics

    Received: Nov. 28, 2022

    Accepted: Feb. 10, 2023

    Published Online: Jun. 13, 2023

    The Author Email: Guo Gang (ggg@ciae.ac.cn), Ma Xiaoyu (maxy@semi.ac.cn)

    DOI:10.3788/AOS222064

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