Journal of Applied Optics, Volume. 43, Issue 1, 74(2022)

High sensitivity micro-displacement homodyne interferometry

Zhongsheng ZHAI... Yi ZHANG, Wei FENG, Sheng FENG, Xuanze WANG and Zhi XIONG |Show fewer author(s)
Author Affiliations
  • Hubei Key Laboratory of Modern Manufacturing Quanlity Engineering, School of Mechanical Engineering, Hubei University of Technology, Wuhan 430068, China
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    Figures & Tables(11)
    Schematic diagram of measuring system
    Sensitivity of white light and laser secondary interference
    Sensitivity S3 curves
    Experimental device diagram
    Original data of laser interference signal
    Original data of white light interference signal
    Curve fitting of laser secondary interference signal
    Curve fitting of white light interference signal
    Sensitivity curves of white light interference and laser secondary interference
    Sensitivity of homodyne interference system
    Noise analysis
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    Zhongsheng ZHAI, Yi ZHANG, Wei FENG, Sheng FENG, Xuanze WANG, Zhi XIONG. High sensitivity micro-displacement homodyne interferometry[J]. Journal of Applied Optics, 2022, 43(1): 74

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    Paper Information

    Category: OPTICAL METROLOGY AND MEASUREMENT

    Received: Jul. 8, 2021

    Accepted: --

    Published Online: Mar. 7, 2022

    The Author Email:

    DOI:10.5768/JAO202243.0103001

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