Journal of Applied Optics, Volume. 43, Issue 1, 74(2022)
High sensitivity micro-displacement homodyne interferometry
Fig. 2. Sensitivity of white light and laser secondary interference
Fig. 9. Sensitivity curves of white light interference and laser secondary interference
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Zhongsheng ZHAI, Yi ZHANG, Wei FENG, Sheng FENG, Xuanze WANG, Zhi XIONG. High sensitivity micro-displacement homodyne interferometry[J]. Journal of Applied Optics, 2022, 43(1): 74
Category: OPTICAL METROLOGY AND MEASUREMENT
Received: Jul. 8, 2021
Accepted: --
Published Online: Mar. 7, 2022
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