Photonic Sensors, Volume. 14, Issue 3, 240309(2024)

Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor

Meizhong LIAO1,2, Yuqi YANG1,2, Xiaolian LU1,2, Haiqi LI1,2, Jun ZHANG1,2、*, Jinfeng WANG3, and Zhe CHEN1,2
Author Affiliations
  • 1Guangdong Provincial Engineering Technology Research Center on Visible Light Communication, Jinan University,Guangzhou 510632, China
  • 2Guangzhou Municipal Key Laboratory of Engineering Technology on Visible Light Communication, Jinan University,Guangzhou 510632, China
  • 3Dongguan Shenzhou Vision Technology Co., Ltd., Dongguan 523127, China
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    References(30)

    [1] [1] K. Grochalski, M. Mendak, M. Jakubowicz, B.Gapiński, N. Swojak, M. Wieczorowski, et al.,“Differences in roughness parameter values from skid and skidless contact stylus profilometers,”Advances in Science and Technology. Research Journal, 2021, 15(1): 58–70.

    [2] [2] W. Gao, H. Haitjema, F. Z. Fang, R. K. Leach, C. F.Cheung, E. Savio, et al., “On-machine and in-process surface metrology for precision manufacturing,” CIRP Annals, 2019, 68(2):843–866.

    [3] [3] S. L. Dobson, P. C. Sun, and Y. Fainman,“Diffractive lenses for chromatic confocal imaging,”Applied Optics, 1997, 36(20): 4744–4748.

    [4] [4] J. McBride, P. Boltryk, and Z. Zhao, “The relationship between surface incline and con-focal chromatic aberration sensor response,” in O3A:Optics for Arts, Architecture, and Archaeology,Munich, Germany, 2007, pp. 355–364.

    [5] [5] H. J. Tiziani and H. M. Uhde, “Three-dimensional image sensing by chromatic confocal microscopy,”Applied Optics, 1994, 33(10): 1838?1843.

    [6] [6] B. S. Chun, K. Kim, and D. Gweon,“Three-dimensional surface profile measurement using a beam scanning chromatic confocal microscope,” Review of Scientific Instruments, 2009,80(7): 073706.

    [7] [7] Q. Yu, K. Zhang, C. Cui, R. Zhou, F. Cheng, R. Ye,et al., “Method of thickness measurement for transparent specimens with chromatic confocal microscopy,” Applied Optics, 2018, 57(33):9722–9728.

    [8] [8] H. M. Park, U. Kwon, and K. N. Joo, “Vision chromatic confocal sensor based on a geometrical phase lens,” Applied Optics, 2021, 60(10):2898–2901.

    [9] [9] H. Hu, S. Mei, L. Fan, and H. Wang, “A line-scanning chromatic confocal sensor for three-dimensional profile measurement on highly reflective materials,” Review of Scientific Instruments, 2021, 92(5): 053707.

    [10] [10] P. C. Lin, P. C. Sun, L. Zhu, and Y. Fainman,“Single-shot depth-section imaging through chromatic slit-scan confocal microscopy,” Applied Optics, 1998, 37(28): 6764–6770.

    [11] [11] K. Korner, A. K. Ruprecht, and T. F. Wiesendanger,“New approaches in depth-scanning optical metrology,” in Optical Metrology in Production Engineering, Strasbourg, France, 2004, pp. 320–333.

    [12] [12] A. K. Ruprecht, K. Koerner, T. F. Wiesendanger, H. J.Tiziani, and W. Osten, “Chromatic confocal detection for high-speed microtopography measurements,” in Three-Dimensional Image Capture and Applications VI, San Jose, USA, 2004,pp. 53–60.

    [13] [13] S. Chanbai, G. Wiora, M. Weber, and H. Roth, “A novel confocal line scanning sensor,” in Scanning Microscopy, Monterey, USA, 2009, pp. 351–358.

    [14] [14] L. C. Chen, T. Y. Lin, Y. W. Chang, and S. T. Lin,“Chromatic confocal surface profilometry employing signal recovering methodology for simultaneously resolving lateral and axial cross talk problems,” in 8th International Symposium on Precision Engineering Measurement and Instrumentation, Chengdu, China, 2023, pp.1133?1138.

    [15] [15] M. Hillenbrand, A. Grewe, M. Bichra, R.Kleindienst, L. Lorenz, R. Kirner, et al.,“Parallelized chromatic confocal sensor systems,” in Optical Measurement Systems for Industrial Inspection VIII, Munich, Germany, 2013, pp.222–231.

    [16] [16] T. Huang, J. Yang, and T. Ma, “Design of a line-scanning dispersive objective lens for chromatic confocal displacement sensor,” in 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies,Chengdu, China, 2021, pp. 186?194.

    [17] [17] M. Taphanel and J. Beyerer, “Fast 3D in-line sensor for specular and diffuse surfaces combining the chromatic confocal and triangulation principle,” in 2012 IEEE International Instrumentation and Measurement Technology Conference Proceedings,Graz, Austria, 2012, pp. 1072–1077.

    [18] [18] M. Taphanel, R. Zink, T. L?ngle, and J. Beyerer,“Multiplex acquisition approach for high speed 3D measurements with a chromatic confocal microscope,” in Optical Measurement Systems for Industrial Inspection IX, Munich, Germany, 2015,pp. 220–227.

    [19] [19] J. Sepp?, K. Niemel?, and A. Lassila, “Metrological characterization methods for confocal chromatic line sensors and optical topography sensors,”Measurement Science and Technology, 2018, 29(5):054008.

    [20] [20] K. Niemel?, “Chromatic line confocal technology in high-speed 3D surface-imaging applications,” in Photonic Instrumentation Engineering VI, San Francisco, USA, 2019, pp. 132–139.

    [21] [21] N. Kulkarni, A. Masciola, A. Nishant, K. J. Kim,H. Choi, A. Gmitro, “Low-cost, chromatic confocal endomicroscope for cellular imaging in vivo,”Biomedical Optics Express, 2021, 12(9): 5629–5643.

    [22] [22] R. Ramamurthy and G. Caza, “Performance evaluation of line confocal imaging for surface roughness measurement application,” in Dimensional Optical Metrology and Inspection for Practical Applications X, Online only, 2021, pp.50–62.

    [23] [23] T. Kim, S. H. Kim, D. Do, H. Yoo, and D. Gweon,“Chromatic confocal microscopy with a novel wavelength detection method using transmittance,”Optics Express, 2013, 21(5): 6286–6294.

    [24] [24] U. Minoni, G. Manili, S. Bettoni, E. Varrenti, D.Modotto, and C. De Angelis, “Chromatic confocal setup for displacement measurement using a supercontinuum light source,” Optics & Laser Technology, 2013, 49: 91–94.

    [25] [25] C. C. Cui, H. Li, Q. Yu, and R. F. Ye, “Design of adjustable dispersive objective lens for chromatic confocal system,” Optics and Precision Engineering,2017, 25(4): 343–351.

    [26] [26] J. Yang, T. Ma, and T. T. Huang, “Design of chromatic confocal quantitative inverse dispersive objective lens,” in 7th Symposium on Novel Photoelectronic Detection Technology and Applications, Kunming, China, 2021, pp.2332–2336.

    [27] [27] Z. L. Zhang and R. S. Lu, “Initial structure of dispersion objective for chromatic confocal sensor based on doublet lens,” Optics and Lasers in Engineering, 2021, 139: 106424.

    [28] [28] T. Liu, J. Wang, Q. Liu, J. Hu, Z. Wang, C. Wan,et al., “Chromatic confocal measurement method using a phase Fresnel zone plate,” Optics Express,2022, 30(2): 2390–2401.

    [29] [29] Q. Liu, W. C. Yang, D. C. Yuan, and Y. Wang,“Design of linear dispersive objective for chromatic confocal microscope”, Optics and Precision Engineering, 2013, 21(10): 2473?2479.

    [30] [30] Z. Cui, Q. Zeng, S. Liu, Y. Zhang, D. Zhu, Y. Guo,et al., “Cell-laden and orthogonal-multilayer tissue-engineered corneal stroma induced by a mechanical collagen microenvironment and transplantation in a rabbit model,” Acta Biomaterialia, 2018, 75: 183–199.

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    Meizhong LIAO, Yuqi YANG, Xiaolian LU, Haiqi LI, Jun ZHANG, Jinfeng WANG, Zhe CHEN. Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor[J]. Photonic Sensors, 2024, 14(3): 240309

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    Paper Information

    Category: Regular

    Received: Oct. 17, 2023

    Accepted: Jan. 4, 2024

    Published Online: Aug. 16, 2024

    The Author Email: ZHANG Jun (tzhangjun_oe@jnu.edu.cn)

    DOI:10.1007/s13320-024-0713-5

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