Optics and Precision Engineering, Volume. 12, Issue z1, 40(2004)
Filtering characteristics of micromachined arrayed microphone on acoustic signal
References(4)
[1] [1] SCHEEPER P R. A review of silicon microphones[J]. Sensors and Actuators,1994, 43: 1-11.
[2] [2] ROYER M. ZnO on Si integrated acoustic sensor[J]. Sensors and Actuators,1983,4:357-362.
[3] [3] BERQVIST J. Capacitive microphone with a surface micromachined back plate using electroplating technology [J].Journal of Microelectromechanical Systems, 1994,3(2): 69-75.
[4] [4] BOUROUINA T. A new silicon condense microphone with a p + silicon membrane[J]. Sensors and Actuators,1992, 31:149-152.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Filtering characteristics of micromachined arrayed microphone on acoustic signal[J]. Optics and Precision Engineering, 2004, 12(z1): 40
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