Acta Optica Sinica, Volume. 21, Issue 6, 734(2001)
Analysis of Measuring Condition for Principle Angle in Spectroscopic Ellipsometry
The measuring condition for principle angle in spectroscopic ellipsometry is analyzed. As the incident angle is equal to principle angle θ p, the phase angle of ellipsometry parameters is 90°. It gives a way to obtain θ p from numerical calculation and analytic equation as the dielectric function of the material is known, and the amplitude ρ p0 of ellipsometry parameters can be calculated accordingly. Higher precision of data can be acquired as measuring at incident angle of θ p. The experimental results of Δ p and ρ p0 correspond very well with the calculated ones. The calculation formulas and methods given in this work can be applied to other spectroscopic experiments.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Analysis of Measuring Condition for Principle Angle in Spectroscopic Ellipsometry[J]. Acta Optica Sinica, 2001, 21(6): 734