Acta Optica Sinica, Volume. 36, Issue 9, 911004(2016)

New Algorithm of Detecting Optical Surface Imperfection Based on Background Correction and Image Segmentation

Zhang Bo1,2、*, Ni Kaizao2, Wang Linjun1, Liu Shijie2, and Wu Lunzhe1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    References(24)

    [2] [2] Gomez S, Hale K, Burrows J, et al. Measurements of surface defects on optical components[J]. Measurement Science and Technology, 1998, 9(4): 607-616.

    [3] [3] Miller P E, Suratwala T I, Bude J D, et al. Initiation of laser damage at surface imperfections on fused silica optics[C]. International Optical Design Conference and Optical Fabrication and Testing, 2010: OWA5.

    [4] [4] Jiao Zhaoyang, Zhang Yanli, Zhang Junyong, et al. Influence of phase distortion on near field beam quality in final target system[J]. Chinese J Lasers, 2014, 41(5): 0502004.

    [5] [5] Wang Wei, Zhang Lei, Feng Suya, et al. Using fluorescent microscopy method to study subsurface defects in Nd-doped phosphate laser glasses[J]. Chinese J Lasers, 2014, 41(9): 0906001.

    [6] [6] You Kewei, Zhang Yanli, Zhang Xuejie, et al. Influence of relative position of optical component surface defects on near filed beam quality[J]. Chinese J Lasers, 2015, 42(3): 0308004.

    [7] [7] Wang Shitong, Yang Yongying, Zhao Limin, et al. Numerical simulation research on scattering light imaging of surface defects of optical components[J]. Chinese J Lasers, 2015, 42(7): 0708005.

    [8] [8] Stolz C J. Status of NIF mirror technologies for completion of the NIF facility[C]. SPIE, 2008, 7101: 710115.

    [9] [9] Thompson C E, Knopp C F, Decker D E. Optics damageinspection for the NIF[C]. SPIE, 1999: 921-932.

    [10] [10] Baker L R. On-machine measurement of roughness, waviness, and flaws[C]. SPIE, 1990: 248-256.

    [11] [11] Wang Chuanke, Kuang Longyu, Wang Zhebin, et al. The stimulated Raman scattering from interaction of 351 nm laser light with hohlraum[J]. Nuclear Fusion and Plasma Physics, 2006, 26(4): 310-313.

    [12] [12] Mascio L N, Logan C M, Martz H E. Automated defect detection for large laser optics[J]. Engineering Reseach, Development and Technology, 1997: 25-30.

    [13] [13] Li Aixing, Yang Tianyi, Zhang Ying. Preliminary research of surface defect recognition based on machine vision[J]. Journal of Chongqing University of Posts and Telecommunications (Natural Science), 2007, 19(4): 442-445.

    [16] [16] Hu Min, Li Mei, Wang Ronggui. Application of an improved Otsu method in image segmentation[J]. Journal of Electronic Measurement and Instrument, 2010, 24(5): 443-449.

    [17] [17] Otsu N. A threshold selection method from gray-level Histograms[J]. IEEE Transactions on Systems, Man, and Cybernetics, 1979, 9(1): 62-66.

    [19] [19] Zhu Kehan, Yang Ming, Jiang Jintao. Correction method for microscope transmittance uneven illumination images[J]. Journal of Computer Applications, 2013, 33(S1): 190-192.

    [21] [21] Zhu Cong, Yu Guangting, Li Bailin, et al. A new algorithm for measuring defects width on precise optics lens surface[J]. Computer Applications and Software, 2014, 31(12): 259-261, 286.

    [22] [22] Tamayo P, Slonim D, Mesirov J, et al. Interpreting patterns of gene expression with self-organizing maps: Methods and application to hematopoietic differentiation[J]. Proceedings of the National Academy of Sciences, 1999, 96(6): 2907-2912.

    [23] [23] Cui hui, Liu Shijie, Zhao Yuan′an, et al. Study on total internal reflection microscopy for subsurface damage[J]. Acta Optica Sinica, 2014, 34(6): 0612004.

    [24] [24] Du Q L, Lan X S, Yuan L, et al. An optical imaging simulation method for inverted microscope and its application in automatic cell manipulation[J]. Advanced Materials Research, 2012, 490: 1981-1985.

    CLP Journals

    [1] Liao Qinkai, Lin Shanling, Lin Zhixian, Chen Zheliang, Li Tiantian, Tang Biao. Electrowetting defect image segmentation based on improved Otsu method[J]. Opto-Electronic Engineering, 2020, 47(6): 190388

    [2] Ma Yun, Chen Lei, Zhu Wenhua, Liu Yiming, Li Jianxin. Dynamic Twyman Interferometer for Phase Defect Measurement[J]. Chinese Journal of Lasers, 2017, 44(12): 1204009

    [3] Liao Qinkai, Lin Shanling, Lin Zhixian, Chen Zheliang, Li Tiantian, Tang Biao. Electrowetting defect image segmentation based on improved Otsu method[J]. Opto-Electronic Engineering, 2020, 47(6): 190388

    Tools

    Get Citation

    Copy Citation Text

    Zhang Bo, Ni Kaizao, Wang Linjun, Liu Shijie, Wu Lunzhe. New Algorithm of Detecting Optical Surface Imperfection Based on Background Correction and Image Segmentation[J]. Acta Optica Sinica, 2016, 36(9): 911004

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Mar. 30, 2016

    Accepted: --

    Published Online: Sep. 9, 2016

    The Author Email: Bo Zhang (th_dw_zb@163.com)

    DOI:10.3788/aos201636.0911004

    Topics