Optics and Precision Engineering, Volume. 19, Issue 10, 2349(2011)
Calibration of measuring error caused by interferometric imaging distortion
[1] [1] SCHULZ G, SCHWIDER J. Precise measurement of planness [J]. Applied Optics,1967,6 (6): 1077-1084.
[2] [2] SCHULZ G, SCHWIDER J. Establishing an optical flatness [J]. Applied Optics, 1971,10(4): 929-934.
[3] [3] SCHREINER R, SCHWIDER J, LINDLEIN N, et al.. Absolute testing of the reference surface of a Fizeau interferometer through even/odd elecompositions [J]. Applied Optics, 2008, 47 (32): 6134-6141.
[4] [4] BURKE J, DAVID S WU. Calibration of spherical reference surfaces for Fizeau interferometry: a comparative study of methods [J]. Applied Optics, 2010,49(31): 6014-6023.
[5] [5] VANNONI M, MOLESINI G. Three-flat test with plates in horizontal posture [J]. Applied Optics, 2008, 47 (12): 2133-2144.
[6] [6] VANNONI M, MOLESINI G. Absolute planarity with three-flat test: an iterative approach with Zernike polynomials [J]. Optics Express,2008, 16(1): 341-354.
[7] [7] LIU D,YANG Y Y, TIAN CH, et al.. Practical methods for retrace error correction in nonnull aspheric testing [J]. Optics Express,2009, 17(9): 7025-7035.
[8] [8] EVANS C J,KESTNER R N. Test optics error removal [J]. Applied Optics,1996,35 (7): 1015-1021.
[9] [9] CREATH K. Error sources in phase-measuring interferometry [C]. SPIE,1992,1720: 428-435.
[12] [12] SELBERG L A. Interferometer accuracy and precision [J]. SPIE, 1990, 1400: 24-33.
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LIU Man-lin, YANG Wang, XUE Wei-cai. Calibration of measuring error caused by interferometric imaging distortion[J]. Optics and Precision Engineering, 2011, 19(10): 2349
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Received: Oct. 27, 2010
Accepted: --
Published Online: Nov. 9, 2011
The Author Email: Man-lin LIU (liuml@ciomp.ac.cn)