Fig. 1. Working principle of AFM system

Fig. 2. Schematic diagram of beam deflection in AFM system

Fig. 3. Schematic diagram of beam deflection in probe consistency system

Fig. 4. Optical path consistency adjustment design schematic

Fig. 5. Mechanical structure design drawing of probe consistent assembly system

Fig. 6. Consistency probe transfer and replacement flowchart

Fig. 7. Probe consistency assembly system physical

Fig. 8. Probe assembly physical drawing

Fig. 9. System light lever amplification ratio measurement chart

Fig. 10. Probe position offset during UV curing

Fig. 11. Probe position offset after compensating for UV adhesive curing deformation

Fig. 12. Consistency probe assembly position data

Fig. 13. Noise variation at different distances of laser spot from PSD center

Fig. 14. AFM scan image at different distances from the center of the PSD