Optics and Precision Engineering, Volume. 32, Issue 2, 137(2024)

Study of a consistent assembly system for AFM probes based on beam deflection method

Baoliang ZHANG1,2, Wenfeng LIANG1, Tie YANG2,3, and Peng YU2,3、*
Author Affiliations
  • 1School of Mechanical Engineering, Shenyang Jianzhu University, Shenyang068 , China
  • 2State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang110016, China
  • 3Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang110169, China
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    To solve the problem of complex and time-consuming optical path adjustment after probe replacement in Atomic Force Microscope(AFM) systems, this paper presents the first proposal to achieve the consistency of the replaced probe with respect to the original optical path position of the AFM system by precisely controlling the probe and probe holder assembly position, thus eliminating the need to adjust the optical path after needle replacement in AFM systems. The optical path consistency component of the system used the beam deflection method to amplify and monitor the probe position and deflection, and used a high-precision displacement and angle adjustment platform to adjust the orientation of the probe relative to the probe clip. The probe consistency effect was verified by physical construction, and the impact of probe position deflection due to Ultraviolet (UV) glue curing process; the impact of detector noise on the imaging quality of the AFM system when the probe is deflected by different amounts was systematically analyzed. The experimental results show that the average position accuracy of the probes assembled by the system is close to 1.1 µm, and it takes only 8 seconds to change the consistent probes in the AFM system. The system achieves high precision and consistent probe assembly, which greatly simplifies the operation of the AFM system to recalibrate the optical path, and can effectively improve the operation and measurement performance of industrial metrology AFM when combined with the automatic needle changing device.

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    Baoliang ZHANG, Wenfeng LIANG, Tie YANG, Peng YU. Study of a consistent assembly system for AFM probes based on beam deflection method[J]. Optics and Precision Engineering, 2024, 32(2): 137

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    Paper Information

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    Received: May. 10, 2023

    Accepted: --

    Published Online: Apr. 2, 2024

    The Author Email: YU Peng (yupeng@sia.cn)

    DOI:10.37188/OPE.20243202.0137

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