[1] [1] UCHINO K.Piezoelectric actuator renaissance［J］.Energy Harvesting & Systems,2015,88(3):342-355.

[2] [2] ZHANG Y,TAN K K,HUANG S.Vision-Servosystem for automated cell injection［J］. IEEE Transactions on Industrial Electronics,2009,56(1):231-238.

[3] [3] ZHU W L,ZHU Z,HE Y,et al.Development of anovel 2-D vibration-assisted compliant cutting system for surface texturing［J］.IEEE/ASME Transactions on Mechatronics,2017,22(4):1796-1806.

[5] [5] LIU Y,YANG X,CHEN W,et al.A bonded-type piezoelectric actuator using the first and second bending vibration modes［J］. IEEE Transactions on Industrial Electronics, 2016, 63(3):1676-1683.

[6] [6] ZHOU M,FAN Z,MA Z,et al.Design and experimental research of a novel stick-slip type piezoelectric actuator［J］.Micromachines,2017,8(5):150.