[1] [1] Duparré A, Kassam S. Relation between light scattering and the microstructure of optical thin films[J]. Applied Optics, 1993, 32(28): 5475-5480.

[2] [2] Tang Jinfa, Gu Peifu, Liu Xu, et al.. Modern Optical Thin Film Technology[M]. Hangzhou: Zhejiang University Press, 2006: 385-388.

[3] [3] Amra C, Grezes-Besset C, Maure S, et al.. Light scattering from localized and random interface or bulk irregularities in multilayer optics: the inverse problem[C]. SPIE, 1994, 2253: 1184-1200.

[4] [4] Elson J M. Theory and Software for Light Scattering from Multilayer Optical Components with Interfacial Roughness[R]. Naval Air Warfare Center, Weapons Division, China Lake, CA, Technical Publication 8084, 1992.

[5] [5] Elson J M. Theory of light scattering from a rough surface with an inhomogeneous dielectric permittivity[J]. Physical Review B, 1984, 30(10): 5460-5480.

[6] [6] Kassam S, Duparré A, Hehl K, et al.. Light scattering from the volume of optical thin films: theory and experiment[J]. Applied Optics, 1992, 31(9): 1304-1313.

[7] [7] Maure S, Albrand G, Amra C. Low-level scattering and localized defects[J]. Applied Optics, 1996, 35(28): 5573-5582.

[8] [8] Arnaud L, Georges G, Deumié C, et al.. Discrimination of surface and bulk scattering of arbitrary level based on angle-resolved ellipsometry: theoretical analysis[J]. Optics Communications, 2008, 281(6): 1739-1744.

[9] [9] Yang Lihong, Wang Tao, Su Junhong, et al.. Influence of laser condition on the damage properties of HfO2 thin film[J]. Acta Optica Sinica, 2013, 33(12): 1231001.

[10] [10] Thielsch R, Gatto A, Heber J, et al.. A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition[J]. Thin Solid Films, 2002, 410(1-2): 86- 93.

[11] [11] He Junpeng, Zhang Yueguang, Shen Weidong, et al.. Optical properties of Al2O3 thin film fabricated by atomic layer deposition[J]. Acta Optica Sinica, 2010, 30(1): 277-282.

[12] [12] Amra C, Grèzes-Besset C, Bruel L. Comparison of surface and bulk scattering in optical multilayers[J]. Applied Optics, 1993, 32(28): 5492-5503.