Optics and Precision Engineering, Volume. 19, Issue 3, 620(2011)

Development of planar micro-spring with low stiffness in low-gn micro inertial switch

WANG Chao*, CHEN Guang-yan, and Wu Jia-li
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    WANG Chao, CHEN Guang-yan, Wu Jia-li. Development of planar micro-spring with low stiffness in low-gn micro inertial switch[J]. Optics and Precision Engineering, 2011, 19(3): 620

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    Paper Information

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    Received: May. 24, 2010

    Accepted: --

    Published Online: Mar. 30, 2011

    The Author Email: Chao WANG (wchao.lzms@gmail.com)

    DOI:

    CSTR:32186.14.

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