Fig. 1. Intensity distribution model of pinhole diffraction under Gaussian beam incidence

Fig. 2. Diffraction field distribution models of pinhole under different alignment conditions.（a）Ideal condition；（b）shift error；（c）defocus error；（d）tilt error

Fig. 3. Intensity distributions of pinhole diffraction under different waists (when d=2μm). (a) Normalized intensity curve;(b) partially enlarged view

Fig. 4. Diffraction intensity maps of pinhole with different shift errors (when d=2μm). (a) dx=0μm; (b) dx=0.5μm; (c) dx=1.0μm; (d) dx=1.5μm

Fig. 5. Intensity normalization curves of pinhole diffraction under different shift error (when d=2μm). (a) Normalized intensity curves; (b) partially enlarged view

Fig. 6. Diffraction intensity maps of pinhole for different defocus errors (when d=2μm). (a) dz=0; (b) dz=10d; (c) dz=20d; (d) dz=30d

Fig. 7. Intensity normalization curves of pinhole diffraction under different defocus error (when d=2μm). (a) Normalized intensity curves; (b) partially enlarged view

Fig. 8. Change of normalized intensity along with defocus error dz under different diameters

Fig. 9. Diffraction intensity maps of pinhole for different tilt errors (when d=5μm). (a) γ=0°; (b) γ=5°; (c) γ=10°; (d) γ=15°

Fig. 10. Center offset value of diffraction spot Δy varying with tilt angle γ