Fig. 1. Working priniciple of robotic polishing

Fig. 2. FEA contact model of polishing pad

Fig. 3. Pressure distribution at bottom of pitch pad under different loads

Fig. 4. （a） Comparison of pressure cross-section curves； （b） Comparison of pressure cross-section curve fits for F=5 N

Fig. 5. Comparison between modified removal function and unmodified removal function with different polishing parameters

Fig. 6. Comparison of corrected removal function with polished removal function

Fig. 7. Experimental setup

Fig. 8. Removal profile of ZnS for different polishing pressures

Fig. 9. Effect of pressure on M-ZnS material removal

Fig. 10. Removal profile for different speed ratios

Fig. 11. M-ZnS material removal rate for different speed ratios

Fig. 12. M-ZnS flat optic

Fig. 13. Polishing simulation results

Fig. 14. Comparison between before and after robotic polishing of M-Zn flat optic