[2] [2] HUTLEY M C. Dirffaction gratings[M]. London: Academic Press, 1982.

[3] [3] PRIAMBODO P S. Theetical analysis, design, fabrication acterization of dielectric nonlinear guidedmode resonance optical filters[D]. Arlington: The University of Texas at Arlington, 2003.

[4] THURMAN S T, MORRIS G M. Controlling the spectral response in guided-mode resonance filter design[J]. Applied Optics, 42, 3225-3233(2003).

[5] ZHENG G G, ZHAO L L, QIAN L M. Fano resonance and tunability of optical response in double-sided dielectric gratings[J]. Optics Communications, 358, 140-146(2016).

[6] WU C H, KHANIKAEV A B, ADATO R. Fano-resonant asymmetric metamaterials for ultrasensitive spectroscopy and identification of molecular monolayers[J]. Nature Materials, 11, 69-75(2012).

[7] WANG J Q, YUAN B H, FAN C Z. A novel planar metamaterial design for electromagnetically induced transparency and slow light[J]. Optics Express, 21, 25159-25166(2013).

[8] FANO U. Effects of configuration interaction on intensities and phase shifts[J]. Physical Review, 124, 1866-1878(1961).

[9] NAZIR A, PANARO S, ZACCARIA R P. Fano coil-type resonance for magnetic hot-spot generation[J]. Nano Letters, 14, 3166-3171(2014).