Fig. 1. Circuit structure of Wheatstone bridge

Fig. 2. Modeling of sensitive film

Fig. 3. Relationship between output voltage and film thickness

Fig. 4. Stress distribution chart

Fig. 5. Relationship between output voltage and location of varistor

Fig. 6. Relationship between output voltage and length of varistor

Fig. 7. Layout of pressure sensor

Fig. 8. Fabrication process flow of chip

Fig. 9. Picture of chip

Fig. 10. Picture of packaged pressure sensor

Fig. 11. Schematic diagram of pressure sensor

Fig. 12. Output curves of pressure sensor at different temperatures