[1] [1] ZHU F, JIN F M, ZHAO Y, et al.. Research progress in transdermal deliver technology of micro needle ［J］. Chinese Journal of Biochemical Pharmaceutics, 2016, 36(8): 149-152. (in Chinese)

[2] [2] ZHANG D D, WU Y L, JU D H, et al.. Progress on micro needles transdermal drug delivery ［J］. China Journal of Traditional Chinese Medicine and Pharmacy, 2014, 29(8): 2559-2562. (in Chinese)

[3] [3] CHEN L, GUI SH Y. Application of microneedles in transdermal drug delivery ［J］. Anhui Medical and Pharmaceutical Journal, 2014, 18(3): 407-411. (in Chinese)

[4] [4] CHEN J, CHEN ZH P, QU M M, et al.. Application of microneedles in transdermal drug delivery ［J］. Journal of International Pharmaceutical Research, 2011, 38(2): 142-147. (in Chinese)

[5] [5] HONG X Y, WU Z ZH, CHEN L ZH, et al.. Hydrogel microneedle arrays for transdermal drug delivery ［J］. Nano-Micro Letters, 2014, 6(3): 191-199.

[6] [6] LEE J W, PARK J H, PRAUSNITZ M R. Dissolving microneedles for transdermal drug delivery ［J］. Biomaterials, 2008, 29(13): 2113-2124.

[7] [7] DAUGIMONT L, BARON N, VANDERMEULEN G, et al.. Hollow microneedle arrays for intradermal drug delivery and DNA electroporation ［J］. The Journal of Membrane Biology, 2010, 236(1): 117-125.

[8] [8] ZHANG H K, GAO S T, LU M ZH, et al.. Vision alignment system for AFM with dual probes ［J］. Opt. Precision Eng., 2014, 22(9): 2399-2406. (in Chinese)

[9] [9] CAO Y T, ZHU J, CAO Y, et al.. Latest research progress of MEMS microneedles ［J］. Micronanoelectronic Technology, 2011, 48(9): 577-582. (in Chinese)

[10] [10] GUPTA J, DENSON D D, FELNER E I, et al.. Rapid local anesthesia in humans using minimally invasive microneedles ［J］. The Clinical Journal of Pain, 2012, 28(2): 129-135.

[11] [11] KIM Y CH, PARK J H, PRAUSNITZ M R. Microneedles for drug and vaccine delivery ［J］. Advanced Drug Delivery Reviews, 2012, 64(14): 1547-1568.

[12] [12] ZHOU C P, LIU Y L, WANG H L, et al.. Transdermal delivery of insulin using microneedle rollers in vivo ［J］. International Journal of Pharmaceutics, 2010, 392(1-2): 127-133.

[13] [13] KIM Y CH, PARK J H, PRAUSNITZ M R. Microneedles for drug and vaccine delivery ［J］. Advanced Drug Delivery Reviews, 2012, 64(14): 1547-1568.

[14] [14] LIANG J Q, YAO J S. The study of LIGA technology ［J］. Opt. Precision Eng., 2000, 8(1): 38-41. (in Chinese)

[15] [15] DU L Q, BAO Q L, ZHAO M, et al.. Fabrication of metal micro-grating with high aspect ratio on metal substrate ［J］. Opt. Precision Eng., 2015, 23(3): 700-707. (in Chinese)

[16] [16] ZHOU ZH J, NIE W R, XI ZH W, et al.. Anti-impact material properties of UV-LIGA multi-layered electroformed nickel ［J］. Opt. Precision Eng., 2015, 23(4): 1044-1052. (in Chinese)

[17] [17] WU Y T, LIAO J D, WENG C C, et al.. Alkanethiolate self-assembled monolayers as a negative or positive resist for electron lithography ［J］. The Journal of Physical Chemistry C, 2009, 113(11): 4543-4548.

[18] [18] KHUMPUANG S, RUTHER P, PAUL O. Micromolding methods for hollow microneedle arrays using megasonically enhanced casting ［C］. Proceedings of the 15th International Conference on Solid-State Sensors, Actuators and Microsystems, IEEE, 2009: 200-203.

[19] [19] HU Y Y, ZHU D, LI H S. Fabrication of metal micro hole array by using over-plating technology ［J］. Opt. Precision Eng., 2010, 18(8): 1793-1800. (in Chinese)