Infrared and Laser Engineering, Volume. 49, Issue 8, 20190532(2020)
System design for beam coupling and alignment monitoring of chip spectrometer
Figures & Tables(12)
Fig. 1. Sketch of system for incident beam coupling and alignment monitoring of chip spectrometer
Fig. 2. Set the image plane tilt according to the Scheimpflug condition
Fig. 4. Schematic diagram of increase the distance between the fiber and the spectrometer
Fig. 7. Spots diagram of different wavelengths and fields of views
Fig. 9. Structure of integrated optical system for incident beam coupling and alignment monitoring of chip spectrometer
Table 1.
Optical design parameters
光学设计参数
View tableView in ArticleTable 1.
Optical design parameters
光学设计参数
Parameter Data source Spectral range/nm 1 550±50 Fiber NA 0.12 Fiber diameter/μm 6 Chip receiving area/μm2 20×20 Angle between the optical axis and the chip normal/(°) 7 Coupling system vertical axis magnification −1× Monitoring system vertical axis magnification −3×
Table 2.
Coupling system lens data
耦合系统透镜数据
View tableView in ArticleTable 2.
Coupling system lens data
耦合系统透镜数据
Lens Material Radius Radius Thickness Diameter 1 H−K9L −15.214 −5.546 0.800 2.536 2 H−K9L 64.029 −11.388 0.800 2.706 Beam splitter H−K9L Infinity Infinity 0.500 3.748 3 H−ZK3 13.385 6.184 1.000 2.326 4 H−K9L 22.000 −10.332 1.000 2.364 5 H−ZK3 5.400 30.545 1.000 2.278
Table 3.
Monitoring system lens data
监测系统透镜数据
View tableView in ArticleTable 3.
Monitoring system lens data
监测系统透镜数据
Lens Material Radius Radius Thickness Diameter 1 H-ZK3 30.545 5.400 1.000 2.278 2 H-K9L −10.332 22.000 1.000 2.364 3 H-ZK3 6.184 13.385 1.000 2.326 4 H-ZK3 −7.211 −20.437 1.000 2.336 5 H-K9L 20.708 −30.453 1.000 2.178 6 H-K9L 65.430 15.977 1.000 2.090
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Zhiying Liu, Xin Jiang, Mingyu Li, Wenbo Jia. System design for beam coupling and alignment monitoring of chip spectrometer[J]. Infrared and Laser Engineering, 2020, 49(8): 20190532
Paper Information
Category: 光电测量
Received: Dec. 5, 2019
Accepted: --
Published Online: Dec. 31, 2020
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