Infrared and Laser Engineering, Volume. 49, Issue 3, 0303014(2020)
Information separation of multi-surface based on wavelength phase-shifting interferometry
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Fig. 6. RMS results under the errors of cavity length and thickness
Fig. 8. Schematic diagram of wavelength phase-shifting interferometer
Fig. 9. Weighted 36-steps phase-shifting interference test experiment
Table 1. Value of simulation parameters
View tableView in ArticleTable 1. Value of simulation parameters
Surface Type Value Surface Type Value Front surface 0 Rear surface 0.5 –0.1 –0.1 0.0 0.03 0.08 0.05 0.1 0.15 300 60 40 450 120 250
Table 2. Frequency ratio distribution when M = 2
View tableView in ArticleTable 2. Frequency ratio distribution when M = 2
Type Multiple of frequency( \begin{document}${v_i}/{v_{f -r} }$\end{document} Type Multiple of frequency( \begin{document}${v_i}/{v_{f -r} }$\end{document} 2 3 1 6
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Yingjie Yu, Lin Chang, Ketao Yan, Weiwei Zheng, Qulei Xu, Chen Wang, Tao Sun. Information separation of multi-surface based on wavelength phase-shifting interferometry[J]. Infrared and Laser Engineering, 2020, 49(3): 0303014
Paper Information
Received: Nov. 1, 2019
Accepted: --
Published Online: Apr. 22, 2020
The Author Email: Chang Lin (18905370986@163.com)
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