Laser & Optoelectronics Progress, Volume. 61, Issue 5, 0512003(2024)
Approach for Measuring Surface Density of Metal Thin Films Based on Full Range Fitting of X-Ray Absorption Spectra
We propose a method based on X-ray absorption spectra (XAS),which allows the calculation of each channel in the energy spectrum. The theoretical absorption energy spectrum of the sample is obtained using the attenuation coefficient curve of the sample elements and the background energy spectrum of the radiation source, and compares with the actual absorption energy spectrum of the sample. The energy spectrum is fitted and the element surface density is calculated with the annealing algorithm. The results show that the standard deviation of repeated experiments when measuring a single element is low and the measurement uncertainty is in the order of
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Shuoran Wang, Zhihong Yan, Yichen Sun, Qi Wang, Shouhua Luo. Approach for Measuring Surface Density of Metal Thin Films Based on Full Range Fitting of X-Ray Absorption Spectra[J]. Laser & Optoelectronics Progress, 2024, 61(5): 0512003
Category: Instrumentation, Measurement and Metrology
Received: Jan. 13, 2023
Accepted: Mar. 22, 2023
Published Online: Mar. 12, 2024
The Author Email: Wang Qi (wangqi_caep@163.com), Luo Shouhua (luoshouhua@seu.edu.cn)