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Chinese Optics Letters, Volume. 9, Issue 9, 093201(2011)

Femtosecond laser ablation of silicon in air and vacuum

Zehua Wu, Nan Zhang, Mingwei Wang, and Xiaonong Zhu
Author Affiliations
  • Key Laboratory of Optical Information Science and Technology, Ministry of Education, Institute of Modern Optics, Nankai University, Tianjin 300071, China
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    Zehua Wu, Nan Zhang, Mingwei Wang, Xiaonong Zhu. Femtosecond laser ablation of silicon in air and vacuum[J]. Chinese Optics Letters, 2011, 9(9): 093201

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    Paper Information

    Category: Ultrafast Optics

    Received: Mar. 18, 2011

    Accepted: Apr. 11, 2011

    Published Online: Jul. 29, 2011

    The Author Email:

    DOI:10.3788/col201109.093201

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology