[1] [1] Williamson, David M. Compensator selection in the tolerancing of a microlithographic lens[C]. SPIE, 1989, 1049: 178-186.

[2] [2] Thomas Sure, Joachim Heil. Microscope objective production: on the way from the micrometer scale to the nanometer scale[C]. SPIE, 2003, 5180: 283-292.

[3] [3] Westort. Design and fabrication of high performance relay lenses[C]. SPIE, 1984, 548: 40-47.

[4] [4] Bruce L Danielson, C Y Boisrobert. Absolute optical ranging using low coherence interferometry[J]. Appl Opt, 1991, 30(21): 2975-2979.

[5] [5] I Verrier, C Veillas, T Lépine. Low coherence interferometry for central thickness measurement of rigid and soft contact lenses[J]. Opt Express, 2009, 17(11): 9157-9170.

[6] [6] Lu Yi, Xu Xiping, Shi Nuo, et al.. Research on measurement method and apparatus for lens center thickness[J]. Journal of Changchun University of Science and Technology, 2013, 36(3-4): 28-31.

[7] [7] Weiqian Zhao, Ruoduan Sun, Lirong Qiu, et al.. Lenses axial space ray tracing measurement[J]. Opt Express, 2010, 18(4): 3608-3617.

[8] [8] Weiqian Zhao, Jiubin Tan, Lirong Qiu. Bipolar absolute differential confocal approach to higher spatial resolution[J]. Opt Express, 2004, 12(21): 5013-5021.

[9] [9] Jiamiao Yang, Lirong Qiu, Weiqian Zhao, et al.. Radius measurement by laser confocal technology[J]. Appl Opt, 2014, 51(13): 2860-2865.

[10] [10] Liu Li, Deng Xiaoqiang, Wang Guiying, et al.. Phase- only optical pupil filter for improving axial resolution in confocal microscopy[J]. Acta Physica Sinica, 2001, 50(1): 48-51.

[11] [11] M Born, E Wolf. Principles of Optics[M]. London: Cambridge University Press, 1999.

[12] [12] Yu Qing, Yu Xiaofen, Bi Meihua. Research on high- precision acquisitive method of surface coordinate information based on parallel confocal microscopy[J]. Acta Optica Sinica, 2009, 29(11): 3057-3060.

[13] [13] Liu Dali, Wang Yun, Qiu Lirong, et al.. Differentical confocal microscopy for edge contour detection and location[J]. Chinese J Lasers, 2014, 41(10): 1008001.