Laser & Optoelectronics Progress, Volume. 52, Issue 3, 31205(2015)
Lenses Axial Space Measurement by Laser Confocal Technology
The axial space between lenses is an important parameter for the assembling of lenses. In order to achieve the precise measurement of the lenses axial space, a laser confocal lenses axial space measurement (LCASM) is proposed. Using the character that the peak point of confocal response curve correspond to the focus of system objective, LCASM utilizes the annular laser confocal chromatography focusing technique (ACFT) to precisely identify the vertex position of an assembled lenses on the inner-and-outer spherical surface, then uses the ray tracing facet iterative algorithm to precisely determine the vertex position, and thereby obtaining the lenses axial space. The preliminary experiments indicate that LCASM has measurement repeatability of 0.3 μm.
Get Citation
Copy Citation Text
Zhao Weiqian, Shen Yang, Qiu Lirong, Yang Jiamiao. Lenses Axial Space Measurement by Laser Confocal Technology[J]. Laser & Optoelectronics Progress, 2015, 52(3): 31205
Category: Instrumentation, Measurement and Metrology
Received: Oct. 8, 2014
Accepted: --
Published Online: Feb. 13, 2015
The Author Email: Yang Shen (shenyang8bit@163.com)