INFRARED, Volume. 41, Issue 5, 13(2020)

Study on Low Resistance Ohmic Contact Technology of GaAs/AlGaAs Quantum Well Infrared Detectors

Zhen TAN, Chun-ling LI, Hai-yan SUN, Min ZHANG, and Cheng-gang WANG
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    The investigation of low resistance ohmic contact on GaAs/AlGaAs quantum well infrared detector is introduced. Combined with the heat treatment process, through testing the I--V characteristics, experiments are conducted on different combinations of Ni/AuGe/Au metal systems to determine the electrode system suitable for n+GaAs/AlGaAs. The heat treatment conditions after metal deposition are preliminary studied. Under the annealing conditions of 400 ℃, nitrogen atmosphere and 60 s, the transmission line model is used to obtain the specific ohmic contact resistance of 3.07×10-5 Ω·cm2 on n+GaAs(1×1018 cm-3).

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    TAN Zhen, LI Chun-ling, SUN Hai-yan, ZHANG Min, WANG Cheng-gang. Study on Low Resistance Ohmic Contact Technology of GaAs/AlGaAs Quantum Well Infrared Detectors[J]. INFRARED, 2020, 41(5): 13

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    Paper Information

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    Received: Mar. 10, 2020

    Accepted: --

    Published Online: Nov. 11, 2020

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2020.05.002

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