Fig. 1. Waveguide cross-sectional mode distribution

Fig. 2. The relationship between array waveguide coupling crosstalk and waveguide length

Fig. 3. Light field distribution of beam splitter

Fig. 4. The relationship between beam splitter transmittance and wavelength

Fig. 5. The relationship between the mode equivalent refractive and the effective refractive index of the waveguide core

Fig. 6. The relationship between the FWHM of far-field spot divergence angle and the number of arrayed waveguides

Fig. 7. Array waveguide far-field spot deflection simulation

Fig. 8. Flow chart of silicon-based phased array chip preparation

Fig. 9. Preparation of silicon-based phased array chip and packaging effect

Fig. 10. Schematic diagram of measurement system

Fig. 11. The far-field spot before and after optimization by particle swarm optimization

Fig. 12. The effect of spot deflection with different phase-shifting voltages applied

Fig. 13. The effect of spot deflection under 1550~1610 nm wavelength tuning