Optics and Precision Engineering, Volume. 16, Issue 4, 676(2008)
Movement characteristics of micro-displacement mechanism with variable friction based on inertial impact principle
References(4)
[4] [4] YUNG T L,TOSHIRO H,RONG F F.A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuatorpart Ⅰ:experimental design and results[J].Precision Engineering,2003,27(1):14-21.
[8] [8] WU T,PAUL I R.Dynamic peak amplitude analysis.and bonding layer effects of piezoelectric bimorph cantilevers[J].Smart Materials and Structures,2004,13(1):203-210.
[9] [9] HIGUCHI T,YAMAGATA Y,KUDOH K.Precise positioning mechanism utilizing rapid deformations of piezoelectric elements[C].Proc.of IEEE workshop on micro electro mechanical systems,Napa Valley,CA,USA 1990:222-226.
[10] [10] JAN G SMITS,SUSAN I,DALKE.The constituent equations of piezoelectric bimorphs[J].Sensors and Actuators A,1991,28(1):41-61.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Movement characteristics of micro-displacement mechanism with variable friction based on inertial impact principle[J]. Optics and Precision Engineering, 2008, 16(4): 676
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