Acta Optica Sinica, Volume. 8, Issue 3, 228(1988)

Method of improving accuracy of rotating analyzer ellipsometer

ZHANG KEQI and TAN YIXUN
Author Affiliations
  • [in Chinese]
  • show less
    References(0)
    Tools

    Get Citation

    Copy Citation Text

    ZHANG KEQI, TAN YIXUN. Method of improving accuracy of rotating analyzer ellipsometer[J]. Acta Optica Sinica, 1988, 8(3): 228

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: May. 11, 1987

    Accepted: --

    Published Online: Sep. 16, 2011

    The Author Email:

    DOI:

    Topics