Acta Optica Sinica, Volume. 8, Issue 3, 228(1988)
Method of improving accuracy of rotating analyzer ellipsometer
Two effects which exist normally in rotating analyzer ellipsometer and decrease the measurement accuracy are analyzed in this paper. The improved measuring method and corrective formula for the measured results are given. By means-of these procedures, the improvement of its accuracy is obvious and has been confirmed by the experiment.
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ZHANG KEQI, TAN YIXUN. Method of improving accuracy of rotating analyzer ellipsometer[J]. Acta Optica Sinica, 1988, 8(3): 228
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