Acta Optica Sinica, Volume. 33, Issue 6, 612009(2013)
Method for Improving the Accuracy of S-Transform Profilometry
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Shen Qiuju, Chen Wenjing, Zhong Min, Su Xianyu. Method for Improving the Accuracy of S-Transform Profilometry[J]. Acta Optica Sinica, 2013, 33(6): 612009
Paper Information
Category: Instrumentation, Measurement and Metrology
Received: Feb. 1, 2013
Accepted: --
Published Online: May. 14, 2013
The Author Email: Qiuju Shen (419509383@qq.com)
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