INFRARED, Volume. 43, Issue 9, 10(2022)

Research on Back-Thinning Technology for Type-II Superlattice Infrared Detector

Chun-ling LI*... Xue FENG, Wei-rong XING, Tao WEN and Peng ZHOU |Show fewer author(s)
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    References(4)

    [2] [2] Smith D L, Mailhiot C. Proposal for Strained Type-Ⅱ Superlattice Infrared Detectors [J]. J Appl Phys, 1987, 62(6): 2545-2548.

    [5] [5] Aifer E H, Jackson E M, Boishin G, et al. Very-long Wave Ternary Antimonide Superlattice Photodiode with 21 m Cutoff [J]. Appl Phys Lett, 2003, 82(25): 4411-4413.

    [6] [6] Grein C H, Cruz H, Flatte M E, et al. Theoretical Performance of Very Long Wavelength InAs/InGaSb Superlattice Based Infrared Detectors [J]. Appl Phys Lett, 1994, 65(20): 2530-2532.

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    LI Chun-ling, FENG Xue, XING Wei-rong, WEN Tao, ZHOU Peng. Research on Back-Thinning Technology for Type-II Superlattice Infrared Detector[J]. INFRARED, 2022, 43(9): 10

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    Paper Information

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    Received: May. 27, 2022

    Accepted: --

    Published Online: Feb. 20, 2023

    The Author Email: Chun-ling LI (lichunling@cetc.com.cn)

    DOI:10.3969/j.issn.1672-8785.2022.09.002

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