[1] [1] SPILLER E. Soft X-ray optics [M]. SPIE Optical Engineering Press, Bellingham,WA,1994.

[2] [2] FIALIN M, RéMY H, ANDRé J-M, et al. Extending the possibilities of soft X-ray spectrometry through the etching of layered synthetic microstructure monochromator[J]. X-Ray Spectrom, 1996, 25:60-65.

[3] [3] SAMMAR A, KRASTEV K, ANDRéJ M, et al. Narrow bandpass multilayer X-ray monochromator[J]. Rev Sci Instrum, 1997, 68(8) :2969-2972.

[4] [4] BENBALAGH R, ANDRé J M, BARCHEWITZ R, et al. Fabrication and characterization of a Mo/Si multilayer monochromator with a narrow spectral bandwidth in the XUV domain[J]. Nucl Instrum Methods Phys Res A, 2001,458:650-655.

[5] [5] ANDRé J-M, BENBALAGH R, BARCHEWITZ R, et al. Soft X-ray multilayer monochromator with improved resolution and low spectral background[J]. X-ray Spectrom, 2001, 30:212-215.