Acta Photonica Sinica, Volume. 36, Issue 9, 1683(2007)

Influence of Two Post-treatment Methods on Properties of HfO2 Thin Films

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(9)

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    [2] [2] ALVISI M,GIULIO M Di,MARRONES G,et al.HfO2 films with high laser damage threshold[J].Thin Solid Films,2000,358:250-258.

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    [5] [5] KONG W J,SHEN J,SHEN Z C,et al.Multi-layer dielectric film for pulse compressed gratings[J].Acta Photonica Sinica,2006,35(1):84-88.

    [6] [6] ZHANG D P,SHAO J D,ZHANG D W,et al.Employing oxygen-plasma posttreatment to improve the laser-induced damage threshold of ZrO2 films prepared by the electron-beam evaporation method[J].Optics Letters,2004,29 (24):2870.

    [7] [7] WU Z L,KUO P K.Laser-induced surface thermal lensing for thin film characterizations[C].SPIE.2714,294-304.

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    [10] [10] DIJON J,POIROUX T,DESRUMAUX C.Laser-induced damage in optical in materials[C].SPIE,1996,2966,3156-3166.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Influence of Two Post-treatment Methods on Properties of HfO2 Thin Films[J]. Acta Photonica Sinica, 2007, 36(9): 1683

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    Paper Information

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    Received: Apr. 17, 2006

    Accepted: --

    Published Online: Feb. 18, 2008

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