Design of Off-Axis Three-Mirror Optical System Based on Free-Form Surface

Fig. 5. Optical structure and image quality evaluation function diagram of small off-axis optical system based on the first type of method. (a) Optical system structure diagram; (b) modulation transfer function; (c) root mean square spot

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Fig. 6. Optical system without considering Seidel aberration. (a) Initial structural diagram; (b) modulation transfer function

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Fig. 7. Optical structure and image quality evaluation function diagram of small off-axis optical system based on the second type of method. (a) Optical system structure diagram; (b) modulation transfer function; (c) root mean square spot

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Fig. 8. Compact optical system structure and image quality evaluation function diagram based on the first type of method. (a) Optical system structure diagram; (b) modulation transfer function; (c) root mean square spot

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Fig. 9. Optical system without considering Seidel aberration. (a) Initial structural diagram; (b) modulation transfer function

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Fig. 10. Compact optical system structure and image quality evaluation function diagram based on the second type of method. (a) Optical system structure diagram; (b) modulation transfer function; (c) root mean square spot

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Table 1. Effects of contour parameters without intermediate imaging on optical system
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Table 1. Effects of contour parameters without intermediate imaging on optical system
Systemstructure α₁ α₂ β₁ β₂
-、+、- (0,1) (0,1) (-¥,-1) (-1,0)
-、+、- (0,1) (1,+¥) (0,+¥) (0,+¥)
+、-、- (1,+¥) (1,+¥) (-¥,-1) (0,+¥)
+、-、- (1,+¥) (0,1) (0,+¥) (-1,0)

Table 2. Effects of contour parameters with intermediate imaging on optical system
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Table 2. Effects of contour parameters with intermediate imaging on optical system
Systemstructure α₁ α₂ β₁ β₂
-、+、- (-¥,0) (1,+¥) (-1,0) (0,+¥)
-、+、- (0,1) (-¥,0) (-¥,-1) (0,+¥)
+、-、- (1,+¥) (-¥,-1) (0,+¥) (0,+¥)

Table 3. Structure parameters of small off-axis optical system based on the first type of method
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Table 3. Structure parameters of small off-axis optical system based on the first type of method
Surface Surface type Radius /mm Thickness /mm
1 Zernike -402.38 -100.48
2 Zernike -160.94 -100.48
3 Conic -191.77 -132.10

Table 4. Structure parameters of small off-axis optical system based on the second type of method
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Table 4. Structure parameters of small off-axis optical system based on the second type of method
Surface Surface type Radius /mm Thickness /mm
1 Zernike -474.48 -150.18
2 Zernike -212.10 -150.18
3 Conic -285.56 -172.69

Table 5. Compact optical system structure parameters based on the first type of method
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Table 5. Compact optical system structure parameters based on the first type of method
Surface Surface type Radius /mm Thickness /mm
1 Zernike -3902.92 -181.04
2 Conic 863.70 122.77
3 Zernike -575.58 -135.04

Table 6. Compact optical system structure parameters based on the second type of method
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Table 6. Compact optical system structure parameters based on the second type of method
Surface Surface type Radius /mm Thickness /mm
1 Zernike -2045.95 -132.27
2 Conic 1640.29 -132.27
3 Zernike -693.11 -204.65

Table 7. Optical system image quality evaluation function
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Table 7. Optical system image quality evaluation function
Parameter Small off-axisangle Compact opticalsystem
Class I Class II Class I Class II
MaximumRMS /μm 6.505 6.200 14.838 13.032
20 lp/mm MTF >0.85 >0.86 >0.78 >0.81

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Junyang Li, Wenqiang Li, You Long, Liang Zhou, Yang Gao. Design of Off-Axis Three-Mirror Optical System Based on Free-Form Surface[J]. Laser & Optoelectronics Progress, 2020, 57(9): 092202

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Paper Information

Category: Optical Design and Fabrication

Received: Aug. 5, 2019

Accepted: Sep. 26, 2019

Published Online: May. 6, 2020

The Author Email: Li Junyang (1281636092@qq.com), Li Wenqiang (469406116@qq.com)

DOI:10.3788/LOP57.092202

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Effects of contour parameters without intermediate imaging on optical system

Table 1. Effects of contour parameters without intermediate imaging on optical system

Table 2. Effects of contour parameters with intermediate imaging on optical system

Table 2. Effects of contour parameters with intermediate imaging on optical system

Table 3. Structure parameters of small off-axis optical system based on the first type of method

Table 3. Structure parameters of small off-axis optical system based on the first type of method

Table 4. Structure parameters of small off-axis optical system based on the second type of method

Table 4. Structure parameters of small off-axis optical system based on the second type of method

Table 5. Compact optical system structure parameters based on the first type of method

Table 5. Compact optical system structure parameters based on the first type of method

Table 6. Compact optical system structure parameters based on the second type of method

Table 6. Compact optical system structure parameters based on the second type of method

Table 7. Optical system image quality evaluation function

Table 7. Optical system image quality evaluation function