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Optoelectronics Letters, Volume. 9, Issue 2, 116(2013)

Low loss Nb2O5 films deposited by novel remote plasma sputtering

Zhe LIU and Yi-kun BU*
Author Affiliations
  • Department of Electronic Engineering, Xiamen University, Xiamen 361005, China
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    LIU Zhe, BU Yi-kun. Low loss Nb2O5 films deposited by novel remote plasma sputtering[J]. Optoelectronics Letters, 2013, 9(2): 116

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    Paper Information

    Received: Nov. 25, 2012

    Accepted: --

    Published Online: Oct. 12, 2017

    The Author Email: Yi-kun BU (buyikun139@163.com)

    DOI:10.1007/s11801-013-2406-y

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology