[1] [1] YUAN Julong, WANG Zhiwei, WEN Donghui,et al. Summary of the status quo of ultra-precision machining ［J］. Chinese Journal of Mechanical Engineering, 2007(01): 35-48.

[2] [2] PENG Jin, XIA Lin, ZOU Wenjun. Research status and prospect of chemical mechanical polishing slurry ［J］. Surface Technology, 2012, 41(2): 78-81.

[3] [3] KIM S, SAKA N, CHUN J H, et al．Modeling and mitigation of pad scratching in chemical-mechanical polishing［J］. CIRP Annals Manufacturing Technology, 2013, 62 (1): 307-310.

[4] [4] XU Xingqin. Study of behaviour of particle group movement in elastic ［D］. Dalian: Dalian University of Technology, 2013.

[5] [5] SHA Shujing, HU Jinfei, ZHANG Hequan. New progress of magnetorheological finishing ［J］. Mechanical Engineer, 2018,1(7): 5-8.

[6] [6] YAN Qiusheng, XU Peijie, LU Jiabin, et al. Stability of colloidal silica polishing solution and its effect on SiC chemical mechanical polishing ［J］. Semiconductor Technology, 2018,43(9): 664-668.

[7] [7] WANG Wenbo. Design of large aperture rapid polishing machine and research of its relative issues［D］. Hernan: Zhongyuan University of Technology, 2015.

[8] [8] DAI Weitao, LV Binghai, WENG Haizhou, et al. Optimization experiment of acoustic assisted shear thickening polishing of cylindrical surface ［J］. Surface Technology, 2016, 45(2): 188-193.

[9] [9] LI Min, YUAN Julong. Fundamental research on shear-thickening polishing method ［J］. Hunan: Hunan University, 2015.

[10] [10] WENG Haizhou, LV Binghai, HU Gangxiang, et al. Optimization experiment of shear thickening polishing of quartz substrates ［J］. Nanotechnology and Precision Engineering, 2017, 15(3): 227-233.

[11] [11] LI M, LYU B, YUAN J, et al． Shear-thickening polishing method ［J］. International Journal of Machine Tools ＆ Man-ufacture, 2015, 94: 88-99.

[12] [12] WAGNER N J, BRADY J F. Shear thickening in colloidal dispersions［J］. Physics Today, 2009, 62(10): 27-32.

[13] [13] LI Min, YUAN Julong, LV Binghai. Preparation of shear thickening polishing abrasive slurries and their polishing properties ［J］. Editorial Office of Optics and Precision Engineering, 2015, 23(9): 2513-2521.

[14] [14] TANG Jiapeng. ANSYS FLUENT 16.0 super learning manual［M］. Beijing: People′s Posts and Telecommunications Press, 2016.

[15] [15] ZHANG Zixiong, DONG Zengnan. Viscous fluid mechanics［M］. Beijing: Tsinghua University Press, 2011.

[16] [16] LIU Jiani. Measurement and evaluation of surface profile parameters of planar optical elements［D］. Xi′an: Xi′an Institute of Technology, 2018.