Acta Optica Sinica, Volume. 22, Issue 7, 863(2002)
Surface Measurement of LCD Substrate by Noncontact Light Probe Flatness Tester
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[in Chinese], [in Chinese], [in Chinese]. Surface Measurement of LCD Substrate by Noncontact Light Probe Flatness Tester[J]. Acta Optica Sinica, 2002, 22(7): 863
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