Infrared and Laser Engineering, Volume. 47, Issue 10, 1017005(2018)
One-dimensional nano-positioning control system
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Li Ruijun, Zhao Wenkai, He Yuantao, Huang Qiangxian. One-dimensional nano-positioning control system[J]. Infrared and Laser Engineering, 2018, 47(10): 1017005
Paper Information
Category: 光电测量
Received: May. 7, 2018
Accepted: Jun. 12, 2018
Published Online: Nov. 25, 2018
The Author Email: Li Ruijun (rj-li@hfut.edu.cn)
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