Acta Photonica Sinica, Volume. 53, Issue 2, 0212001(2024)

Method for Refractive Index Uniformity Measurement Based on Two-flat and Three-flat Test

Zhiyao MA, Donghui ZHENG*, Lei CHEN, and Jun MA
Author Affiliations
  • Nanjing University of Science and Technology,School of Electronic and Optical Engineering,Nanjing 210094,China
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    Figures & Tables(13)
    Steps of two-flats refractive index uniformity test
    The original simulation wave
    Recovered refractive index uniformity wavefront results and its residual comparison
    Experimental setup for two flats refractive index uniformity test
    Wavefront of refractive index uniformity of transmission flat by two flats method
    Experiment of transmission method for refractive index uniformity test
    Steps for measure refractive index uniformity by transmission method
    The result of refractive index uniformity
    Relationship between the rotation angle error and the residual error
    Relationship between the pixel offset and residual error
    • Table 1. PV and RMS values of original simulation wavefront

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      Table 1. PV and RMS values of original simulation wavefront

      WavefrontOriginal wavefront AOriginal wavefront BOriginal wavefront CRefractive index uniformity wavefront
      PV/nm50.6566.6763.1478.00
      RMS/nm5.529.538.6311.59
    • Table 2. The PV and RMS values of recovered refractive index uniformity

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      Table 2. The PV and RMS values of recovered refractive index uniformity

      WavefrontOriginal refractive index uniformityRecovered refractive index uniformityRest error
      PV/nm78.0072.4421.11
      RMS/nm11.599.276.57
    • Table 3. PV and RMS of the recovered refractive index uniformity

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      Table 3. PV and RMS of the recovered refractive index uniformity

      WavefrontRecovered refractive index uniformity by two flats methodRecovered refractive index uniformity by transmission method
      PV/nm62.8059.06
      RMS/nm12.0510.78
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    Zhiyao MA, Donghui ZHENG, Lei CHEN, Jun MA. Method for Refractive Index Uniformity Measurement Based on Two-flat and Three-flat Test[J]. Acta Photonica Sinica, 2024, 53(2): 0212001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jul. 25, 2023

    Accepted: Sep. 11, 2023

    Published Online: Mar. 28, 2024

    The Author Email: ZHENG Donghui (zdonghui@njust.edu.cn)

    DOI:10.3788/gzxb20245302.0212001

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