[1] [1] L. M. Goncalves, J. M. Rocha, C. Couto et al.. On-chip array of thermoelectric Peltier microcoolers［J］. Sensors and Actuators A, 2008, 145-146: 75～80

[2] [2] Wang Li, Shang Xiaoxing, Wang Ying. Development of low-light level night vision［J］. Laser & Optoelectronics Progress, 2008, 45(3): 56～60

[3] [3] Peng Liang Ci, Shi Jing, Fei Wang et al.. Novel thermoelectric materials based on boron-doped silicon microchannel plates［J］. Mater. Lett., 2011, 65(11): 1618～1620

[4] [4] S. M. Shank, J. Soave, A. M. Then et al.. Fabrication of high aspect ratio structures for microchannel plates［J］. J. Vac. Sci. Technol. B., 1995, 13(6): 2736～2740

[5] [5] Tai-ran Hsu. MEMS & Microsystems: Design and Manufacture［M］Beijing: China Machine Press, 2004

[6] [6] Chen Nan, Le Wushi, Long Gaoqun et al.. Manufacture technology of microchannel plate with high resolution［J］. Laser & Optoelectronics Progress, 2010, 47(6): 062201

[7] [7] Zhang Xiaoge. Electrochemistry of Silicon and Its Oxide［M］. Beijing: Chemical Industry Press, 2004

[8] [8] Zhao Zhigang, Bai Caili, Guo Jinchuan et al.. Fabrication of wall array by electrochemical etching of n-type silicon[C]. SPIE, 2007, 6836: 68360W

[9] [9] Liu Enke. Semiconductor Physics［M］. Beijing: Electronic Industry Press, 2003

[10] [10] Gu Mu, Wang Di, Ni Chen et al.. A pulsed X-ray facility for fluorescent lifetime measurement based on microchannel plate photomultiplier tube［J］. Acta Optica Sinica, 2008, 28(4): 813～816

[11] [11] V. Lehmann, H. FoII. Formation mechanism and properties of electrochemically etched trenches in n-type silicon[J]. J. Electrochem. Soc., 1990, 137(2): 653～659