[1] [1] DAI R,XIE T B. Design and analysis od 1-DOF nano-positioning stage[J]. Opt. Precision Eng.,2006,14(4): 428-433. (in Chinese)

[2] [2] JIANG X Q,BLUNT L,STOUT K J. Application of the lifting wavelet to rough surfaces[J]. Precision Engineering,2001,25 (2): 83-89.

[3] [3] YUAN Y B,QIANG X F,SONG J F,et al.. Fast algorithm for determining the Gaussian filtered mean line in surface metrology[J]. Precision Engineering,2000,241(1): 62-69.

[4] [4] JIANG X Q. Theory and Application of New-Generation Geometrical Product Specification[M]. Beijing:High Education Press,2007. (in Chinese)

[5] [5] British Standards Institution. ISO 5436-2 Geometrical product specifications surface texture: profile method;measurement standards-part 2: software measurement standards[S]. London:BSI,2003.

[6] [6] Softgauges for Surface topography[EB/OL]. http://161.112.232.32/softgauges

[7] [7] British Standards Institution.ISO 11562 Geometric product specifications-surface texture: profile method - metrological characteristics of phase correct filters[S].London:BSI,1998.

[8] [8] HUANG F G,CUI CH C. Comparison of evaluating precision of straightness error between least square method and least envelope zone method[J]. Opt. Precision Eng.,2007,15(6):889-893. (in Chinese)

[9] [9] CUI CH C,YE D,HUANG Q C,et al.. Precise computation of planar straightness error using genetic algorithm[J]. Opt. Precision Eng.,2003,11(4): 374-378