Optics and Precision Engineering, Volume. 21, Issue 10, 2587(2013)

Design of elastic structure parameters of probe in micro-nano CMM

CHEN Xiao-huai... CHEN He*, WANG Shan, LI Rui-jun and GAO Wei |Show fewer author(s)
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    CHEN Xiao-huai, CHEN He, WANG Shan, LI Rui-jun, GAO Wei. Design of elastic structure parameters of probe in micro-nano CMM[J]. Optics and Precision Engineering, 2013, 21(10): 2587

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    Paper Information

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    Received: May. 7, 2013

    Accepted: --

    Published Online: Nov. 1, 2013

    The Author Email: He CHEN (chenhehfut@163.com)

    DOI:10.3788/ope.20132110.2587

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