OPTRONIC CONTROL SYSTEM OF ELECTROSTATIC SUSPENSION WITH OPTRONIC FEEDBACK CONTROL

[in Chinese]; [in Chinese]; [in Chinese]

Acta Photonica Sinica, Volume. 31, Issue 2, 187(2002)

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References(5)

[1] [1] Ota M.Mag-Lev semiconductor wafer transporter for ultrahigh-vacuum environment.in Proc 2nd Int Symp Magnetic Bearings,Tokyo,Japan,1990:109～114

[2] [2] Ford R G,Koh A S.Noncontact semiconductor wafer handling.in Proc Soc Manuf Eng Annu Meeting 1990:1～10

[3] [3] Hashimoto Y.Noncontact substance transportation using acoustic levitation.in Proc 7th Symp Electromagnetics and Dynamics,Nagasaki,Japan,1995:449～454

[4] [4] Brandt E H.Levitation in physics,Science Jan,1989,243:349～354

[7] [7] Hamamatsu Co.Position-sensitive Detectors.Japan,October 1985:9～13

CLP Journals

[1] Yueke DING, Shihua HUANG. Study on Passivation of Monocrystalline Silicon by Tandem Hydrogenated Amorphous Silicon Film[J]. Acta Photonica Sinica, 2021, 50(3): 194

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[in Chinese], [in Chinese], [in Chinese]. OPTRONIC CONTROL SYSTEM OF ELECTROSTATIC SUSPENSION WITH OPTRONIC FEEDBACK CONTROL[J]. Acta Photonica Sinica, 2002, 31(2): 187

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