Journal of Synthetic Crystals, Volume. 49, Issue 11, 2194(2020)
High Quality βGa2O3 Single Crystal and Fabrication of Schottky Diode
The high quality βGa2O3 single crystal doped with Si was grown by edgedefined filmfed grown (EFG) method with the doping concentration of 2×1018 cm-3. The crystal is light blue and the basic properties of the crystal were characterized by Laue diffraction, cathodoluminescence (CL) and Raman test. These characterisations show that the quality of the asgrown crystal is high. The bandgap is about 4.71 eV obtained by ultraviolet transmittance spectrum. In addition, vertical Schottky diode was fabricated on the crystal by electron beam evaporation, lithography and development techniques. The average breakdown field strength EAva of the Schottky diode is 2.1 MV/cm and the on resistance is 3 mΩ·cm2. Therefore, the simple βGa2O3 device shows excellent performance.
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ZHANG Jin, HU Zhuangzhuang, MU Wenxiang, TIAN Xusheng, FENG Qian, JIA Zhitai, ZHANG Jincheng, TAO Xutang, HAO Yue. High Quality βGa2O3 Single Crystal and Fabrication of Schottky Diode[J]. Journal of Synthetic Crystals, 2020, 49(11): 2194
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Published Online: Jan. 26, 2021
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CSTR:32186.14.