Chinese Journal of Quantum Electronics, Volume. 36, Issue 2, 219(2019)
Crystallization of amorphous silicon films annealed by line shape excimer laser beam
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YIN Guangyue, YOU Libing, CHEN Xing, SHAO Jingzhen, CHEN Liang, WANG Qingsheng, FANG Xiaodong. Crystallization of amorphous silicon films annealed by line shape excimer laser beam[J]. Chinese Journal of Quantum Electronics, 2019, 36(2): 219
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Published Online: Apr. 3, 2019
The Author Email: Guangyue YIN (378575080@qq.com)