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Chinese Optics Letters, Volume. 4, Issue 10, 611(2006)

B4C/Mo/Si high reflectivity multilayer mirror at 30.4 nm

[in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
Author Affiliations
  • 1Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092
  • 2National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029
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    [1] [1] M. F. Ravet, F. Bridou, X. Zhang-Song, A. Jerome, F. Delmotte, R. Mercier, M. Bougnet, P. Bouyries, and J. P. Delaboudiniere, Proc. SPIE 5250, 99 (2004).

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    [8] [8] J. I. Larruquert, Opt. Soc. Am. A 19, 391 (2002).

    [9] [9] http://www.cxro.lbl.gov/.

    [10] [10] Z. Zhang, Z. Wang, F. Wang, W. Wu, H. Wang, S. Qin, and L. Chen, Chin. Opt. Lett. 3, 422 (2005).

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    CLP Journals

    [1] Junling Qin, Jianda Shao, Kui Yi, Zhengxiu Fan. Interface roughness, surface roughness and soft X-ray reflectivity of Mo/Si multilayers with different layer number[J]. Chinese Optics Letters, 2007, 5(5): 301

    [2] Moyan Tan, Haochuan Li, Qiushi Huang, Hongjun Zhou, Tonglin Huo, Xiaoqiang Wang, Jingtao Zhu. Mo/Si aperiodic multilayer broadband reflective mirror for 12.5–28.5-nm wavelength range[J]. Chinese Optics Letters, 2011, 9(2): 023102

    [3] Liqin Liu, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Moyan Tan, Qiushi Huang, Rui Chen, Jing Xu, Lingyan Chen. Intrinsic stress analysis of sputtered carbon film[J]. Chinese Optics Letters, 2008, 6(5): 384

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. B4C/Mo/Si high reflectivity multilayer mirror at 30.4 nm[J]. Chinese Optics Letters, 2006, 4(10): 611

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    Paper Information

    Received: May. 29, 2006

    Accepted: --

    Published Online: Oct. 31, 2006

    The Author Email:

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology