Acta Photonica Sinica, Volume. 41, Issue 2, 249(2012)

Low Ohmic Contact Resistance 980 nm VCSELs Fabricated

LI Zai-jin1,*... QU Yi1, BO Bao-xue1, LIU Guo-jun1 and WANG Li-jun2 |Show fewer author(s)
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    References(11)

    [1] [1] KUCHTA D M, KWARK Y H, SCHUSTER, et al. 120-Gbps VCSEL based parallel-optical interconnect and custom 120-Gb/s testing station[J]. Journal of Lightwave Technology, 2004,22(9): 2200-2212.

    [2] [2] IGA K. Vertical-cavity surface-emitting laser: its conception and evolution[J]. Japanese Journal of Applied Physics, 2008, 47(1): 1-10.

    [3] [3] WU J, LORDANCHE G, SUMMERS H D, et al. Optical characteristics of VCSEL pumped microchip lasers[J]. Optics Communications, 2001, 196(1-6): 251-256.

    [4] [4] LAN P Y, CHEN Y F, HUANG K F, et al. Oxide- confined vertical-cavity surface-emitting lasers pumped Nd∶YVO4 microchip lasers[J]. IEEE Photonics Technology Letters, 2002, 14(3): 272-274.

    [5] [5] BOUWMANS G, PERCIVAL R M, WADSWORTH W J, et al. High-power Er∶Yb fiber laser with very high numerical aperture pump- cladding waveguide[J]. Applied Physics Letters, 2003, 83(5): 817-818.

    [6] [6] SHINODA K, MAKINO S, KITATANI T. Highly reliable operation of InGaAlAs/InGaAsP integrated lasers[C].IPRM′07 IEEE 19th International Conference on Indium Phosphide & Related Materials,2007: 39-42.

    [7] [7] ORTSIEFER M, BAYDAR S, WINDHORN K, et al. Long-wavelength monolithic VCSEL arrays with high optical output power[J]. Electronics Letters, 2005, 41(14): 807-808.

    [8] [8] SEURIN J, XU G, KHALFIN V, et al. Progress in high-power high-efficiency VCSEL arrays[C]. SPIE, 2009, 7229: 722903-1-722903-11.

    [9] [9] D′ASARO L A, SEURIN J, WYNN J D. High-power, high-efficiency VCSELs pursue the goal[J]. Photonics Spectra, 2005, 2: 64-66.

    [10] [10] CHILLA J, SHU Qi-ze, ZHOU Hai-long, et al. Recent advances in optically pumped semiconductor lasers[C]. SPIE, 2007, 6451: 645109-1-645109-10.

    [11] [11] YAN Chang-ling, NING Yong-qiang, QIN Li, et al. High power vertical cavity surface emitting laser with an extra Au layer[J]. IEEE Photonics Technology Letters, 2005, 17(8):1599-1601.

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    LI Zai-jin, QU Yi, BO Bao-xue, LIU Guo-jun, WANG Li-jun. Low Ohmic Contact Resistance 980 nm VCSELs Fabricated[J]. Acta Photonica Sinica, 2012, 41(2): 249

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    Paper Information

    Received: Aug. 8, 2011

    Accepted: --

    Published Online: Mar. 9, 2012

    The Author Email: Zai-jin LI (lizaijin@126.com)

    DOI:10.3788/gzxb20124102.0249

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