Surface Topography Measurement Technology Based on Optical Frequency Comb

Guanhao Wu; Liheng Shi; Erge Li

doi:10.3788/LOP223339

Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312013(2023)

Surface Topography Measurement Technology Based on Optical Frequency Comb

Guanhao Wu^†、*, Liheng Shi^1、†, and Erge Li

State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China

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Guanhao Wu, Liheng Shi, Erge Li. Surface Topography Measurement Technology Based on Optical Frequency Comb[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312013

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Dec. 17, 2022

Accepted: Jan. 6, 2023

Published Online: Feb. 22, 2023

The Author Email: Wu Guanhao (guanhaowu@mail.tsinghua.edu.cn)

DOI:10.3788/LOP223339

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology